The Jipelec TubeStar furnace is a low cost tubular furnace for thermal and LPCVD processes. The system has high vacuum and gas mixing capabilities.

Temperature measurement and control system allows accurate and repeatable thermal behavior from low to high temperature.

The TubeStar furnace is equipped with the Jipelec PIMS PC control for recipes edition, data monitoring and data storage.

The Jipelec TubeStar has been specially developed to meet the requirements of pilot and low volume production. The design and the budget make it suitable for universities and research laboratories.

Applications:		LPCVD processes Stress-free silicon-rich nitride Annealing Oxidation Diffusion
Features:		Up to 200 mm wafers Multi zones temperature control Atmospheric & vacuum process capability One purge gas line Up to 6 gas lines with MFC PC control Vacuum valve and vacuum gauge
Performance:		Temperature range: up to 1200°C
Optional features:		Vacuum pump Turbomolecular pumping unit