Jipelec - Furnaces and thin Film Deposition
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Jipelec an innovative company
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semiconductor, microsystems and solar cells industries.

JIPELEC is a leading supplier of RTP and CVD equipment for niche applications for the semiconductors, microsystems and solar cells industries. Our R&D engineers develop systems for future low temperature processes and for emerging technologies.

An application guideline table is available to ease your choice and meet your requirements in terms of applications and material. This list is non-exhaustive. Feel free to contact Qualiflow engineers for further information or any request.

For vaporization applications, find the best suitable products through our QUALIFLOW vaporization range of products.

JetFirst Low cost bench top RTP processor is the perfect tool for R&D application. The high reliability allows small-scale production up to 5000 wafers par year.
JetStar Versatile RTP processor to transfer your process from development to production. The manual system can be upgraded to cassette to cassette system.
JetClip The Jipelec JetClip is a SEMI-MESC compatible Rapid Thermal Processing cluster module for wafer sizes up to 200 mm diameter. The unique metal sealed chamber offers multi-process capability from RTP to silicon and SiGe Epitaxy
JetClip sg The Jipelec JetClip sg low temperature Rapid Thermal Annealing (RTA) system utilizes a high power ultraviolet source to assist annealing process. When used for ferroelectric and high-k materials such as PZT, SBT and BST, post annealing temperature can be reduced, a requirement in new generation devices.
SiC Furnace The Jipelec SiC Furnace has been developed for the rapid thermal annealing process of silicon carbide wafers up to 2000°C.
TubeStar The Jipelec TubeStar furnace is a low cost tubular furnace for thermal and LPCVD processes. The system is a mini batch system dedicated to MEMS application and stress free silicon nitride film deposition.
PlasmaStar The PlasmaStar PECVD System is the dedicated tool for process development on PECVD SiN processes for solar cell applications.
DuoVap Innovative fractionated vaporization system for MOCVD. In CVD processes, solutions are the best way to handle solid precursors. DuoVap allows to eliminate solvent vapors before evaporating the precursors.
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