Thanks to the Jipelec InJect (liquid delivery and evaporation system), CEA/CEREM has demonstrated that injection MOCVD at atmospheric pressure is a promising route for obtaining metallic oxides on different kind of substrates.
CEA/CEREM has deposited crystallised (anatase phase), dense and adherent TiO2 layers at low temperature (< 400°C) with a growth rate up to 18µm/h on silicon and stainless steel substrates. In comparison with spray pyrolysis process, the thick layers are more adherent and denser.
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Scanning Electron Microscopy fractography: TiO2 on stainless steel
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XRD spectrum
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JIPELEC Contact:
Dr. Hervé Guillon
JIPELEC
11 Chemin du vieux chêne
F-38240 MEYLAN
Phone: +33 4 76 04 06 06
Fax: +33 4 76 04 81 40
E-mail: guillon@jipelec.com |
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CEREM Contact:
E. Rouvière
CEA/CEREM
17 Rue des Martyrs
F-38054 GRENOBLE Cédex 9
Phone: +33 476 88 91 42
Fax: +33 476 88 46 21
E-mail: rouviere@chartreuse.cea.fr
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