| The crystallization of the ferroelectric perovskite phase of modified lead titanate (mPT) from sol-gel layer has been achieved at a temperature as low as 550°C using ultraviolet-assisted rapid thermal processing (UV-RTP). This compares well to the temperature of 650°C required to develop the same perovskite phase of mPT using purely thermal RTP.
The reduction in the maximum processing temperature achieved by UV-RTP opens the possibility for wider applications of ferroelectrics, high-k and oxide materials on thermally sensitive substrates and structures (above IC for instance).
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UV is used for bond cleavage, while the thermal process at 550° C is used for development of the perovskite crystal phase. |
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Samples prepared by this process proved to be single phase.
Dielectric constant =166
Loss tangent = 0.08
Maximum pyroelectric coefficient = 16 x 10-9 C.cm-2.K-1 Remanent polarization, Pr = 22 mC.cm-2
Longitudinal coefficient, d33 = 38pm/V
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| UV-RTP processes were performed in the Jipelec JetClip sg reactor (patented technology) with both IR halogen lamps (for RTP capabilities) and high power UV excimer lamps. |
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| Jipelec offers customer demonstrations and tests upon request |
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| For further information please contact: |
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