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| AIXTRON Integrates the Jipelec Inject Liquid Delivery System |
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Based on a new concept for the highly repeatable delivery and evaporation of liquid precursors as used in MOCVD of oxide-based materials, JIPELEC has introduced the Jipelec Inject Liquid Precursor Delivery and Evaporation System. The Jipelec Inject is modularly integrated into AIXTRON’s TricentTM MOCVD System for the deposition of multicomponent ferroelectric materials (e.g. SBT, PZT) and high-k materials for capacitor and gate dielectrics (e.g. BST, ZrO2, HfO2). As an important pre-requisite for the production-scale MOCVD of those materials, AIXTRON identified the precisely controlled and highly repeatable delivery of the liquid precursors and their evaporation. The delivery and evaporation unit developed by JIPELEC showed a stable performance over time, resulting in a highly repeatable film deposition, satisfying the high requirements of full-scale production. JIPELEC’s technology concept is based on an exclusive license granted by the French CNRS research institute, for which AIXTRON acquired an exclusive worldwide license.
Contrasting to other commercial systems that were thoroughly evaluated by AIXTRON, the Jipelec Inject repeatable performance is primarily based on a contactless evaporation of the precursor materials, thus completely avoiding residual material on a hot (evaporating) surface. It has been observed that residual material may give cause to the creation of particles and to "memory effects", negatively affecting the repeatability of results. In the Jipelec Inject system, the precursors are instead injected into a heated volume, the evaporator, in precisely controlled doses, to be efficiently evaporated without any residue.
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| AIXTRON Acquired Shareholding in JIPELEC |
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| In order to support JIPELEC in the further development of the LDS technology, AIXTRON acquired a minority stake of 7.4% of JIPELEC, at the same time having been granted the exclusive license to use JIPELEC’s technology and secure delivery under an exclusive OEM agreement. With the TricentTM platform fully developed to implement the Jipelec Inject technology, AIXTRON is now ready to satisfy the market demand for production-mature solutions for the deposition of ferroelectric and high-k materials. |
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